The illustration shows a schematic image of the proposed single-axis MEMS capacitive accelerometer ... layers for the spring structure, and the M4 and fifth (M5) layers for the proof mass structure.

Their research (DOI: 10.1038/s41378-024-00826-x), published in Microsystems & Nanoengineering on March 5, 2025, introduces a MEMS accelerometer featuring an advanced anti-spring mechanism.