announced today that it has received a follow on order for a production Chemical Vapor Infiltration (CVI) system valued at ...

Scientists in the Electronic Nanomaterials Group pioneered a novel material synthesis technique called vapor-phase infiltration. This technique bonds a precursor chemical, in vapor form ...

Nam's technology is based on infusing inorganic elements (purple molecules) by vapor into an organic extreme-ultraviolet (EUV) photoresist (green) on a substrate such as silicon (Si). The ...